Inventor

AHN WON-SUK

KR2 patents

Patents

2 patents

US7527901B2May 5, 2009

Method of repairing phase shift mask

SAMSUNG ELECTRONICS CO LTD5 citations59

US7521156B2Apr 21, 2009

Photo mask and method of correcting the transmissivity of a photo mask

SAMSUNG ELECTRONICS CO LTD3 citations59