Inventor

GOETHALS ANNE-MARIE

BE3 patents

⚠️ This page may combine multiple inventors who share the name “GOETHALS ANNE-MARIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IMEC

2 patents

US7750319B2Jul 6, 2010

Method and system for measuring contamination of a lithographical element

IMEC6 citations57

US8006202B2Aug 23, 2011

Systems and methods for UV lithography

IMEC1 citations48

JONCKHEERE RIK

1 patent

US9086638B2Jul 21, 2015

Detection of contamination in EUV systems

JONCKHEERE RIK1 citations41