Inventor

MUKA RICHARD S

US30 patents

⚠️ This page may combine multiple inventors who share the name “MUKA RICHARD S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MUKA RICHARD S

BROOKS AUTOMATION INC

Multi-level substrate processing apparatus

Substrate transport apparatus with double substrate holders

Substrate transport apparatus with double substrate holders

Substrate heating apparatus with cantilevered lifting arm

Door drive mechanisms for substrate carrier and load lock

Passive gas substrate thermal conditioning apparatus and method

Low-gas temperature stabilization system

Method for heating or cooling wafers

Batchloader for load lock

Cluster tool batchloader of substrate carrier

Batchloader for substrate carrier on load lock

Multi-level substrate processing apparatus

Apparatus and method for batch thermal conditioning of substrates

Low-gas temperature stabilization system

VARIAN ASSOCIATES

Heater assembly for thermal processing of a semiconductor wafer in a vacuum chamber

Semiconductor processor incorporating blackbody radiation source with constant planar energy flux

Blackbody radiation source with constant planar energy flux

Blackbody radiation source for producing constant planar energy flux

Process for treating a semiconductor material by blackbody radiation source with constant planar energy flux

VARIAN SEMICONDUCTOR EQUIPMENT

Automated wafer buffer for use with wafer processing equipment

Technique for low-temperature ion implantation

Techniques for temperature controlled ion implantation

EATON CORP

Sealing apparatus for a vacuum processing system

Sputtering system

Wafer handling apparatus

(unassigned)

Vacuum integrated SMIF system

ENGLAND JONATHAN G

Technique for low-temperature ion implantation

EASTMAN KODAK CO

Document feeder with improved vacuum system

BROOKS AUTOMATION

Load arm for load lock

MILLER TIMOTHY J

System and method for gas leak control in a substrate holder