Inventor
JEONG UKYO
US5 patents
⚠️ This page may combine multiple inventors who share the name “JEONG UKYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT
4 patentsUS7993698B2Aug 9, 2011
Techniques for temperature controlled ion implantation
VARIAN SEMICONDUCTOR EQUIPMENT5 citations57
US7378335B2May 27, 2008
Plasma implantation of deuterium for passivation of semiconductor-device interfaces
VARIAN SEMICONDUCTOR EQUIPMENT1 citations50
US7544959B2Jun 9, 2009
In situ surface contamination removal for ion implanting
VARIAN SEMICONDUCTOR EQUIPMENT0 citations49
US7459703B2Dec 2, 2008
Ion implant beam angle integrity monitoring and adjusting
VARIAN SEMICONDUCTOR EQUIPMENT1 citations49