Inventor
ZALUBOVSKY SERGEY
US6 patents
⚠️ This page may combine multiple inventors who share the name “ZALUBOVSKY SERGEY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
3 patentsUS10775323B2Sep 15, 2020
Full beam metrology for X-ray scatterometry systems
KLA TENCOR CORP19 citations93
US10767978B2Sep 8, 2020
Transmission small-angle X-ray scattering metrology system
KLA TENCOR CORP4 citations71
US10748736B2Aug 18, 2020
Liquid metal rotating anode X-ray source for semiconductor metrology
KLA TENCOR CORP4 citations69