Inventor
OPOCENSKY EDWARD C
US5 patents
⚠️ This page may combine multiple inventors who share the name “OPOCENSKY EDWARD C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
4 patentsUS6162344ADec 19, 2000
Method of electroplating semiconductor wafer using variable currents and mass transfer to obtain uniform plated layer
NOVELLUS SYSTEMS INC179 citations98
US6110346AAug 29, 2000
Method of electroplating semicoductor wafer using variable currents and mass transfer to obtain uniform plated layer
NOVELLUS SYSTEMS INC158 citations98
US6074544AJun 13, 2000
Method of electroplating semiconductor wafer using variable currents and mass transfer to obtain uniform plated layer
NOVELLUS SYSTEMS INC288 citations98
US9385035B2Jul 5, 2016
Current ramping and current pulsing entry of substrates for electroplating
NOVELLUS SYSTEMS INC10 citations83