Inventor
NGUYEN CHAU
US20 patents
⚠️ This page may combine multiple inventors who share the name “NGUYEN CHAU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS6354241B1Mar 12, 2002
Heated electrostatic particle trap for in-situ vacuum line cleaning of a substrated processing
APPLIED MATERIALS INC48 citations92
US5925189AJul 20, 1999
Liquid phosphorous precursor delivery apparatus
APPLIED MATERIALS INC27 citations92
US6616973B1Sep 9, 2003
Liquid phosphorous precursor delivery apparatus
APPLIED MATERIALS INC5 citations74
US6163007ADec 19, 2000
Microwave plasma generating apparatus with improved heat protection of sealing O-rings
APPLIED MATERIALS INC14 citations74