Inventor

KAO CHI-AN

TW5 patents

⚠️ This page may combine multiple inventors who share the name “KAO CHI-AN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHENG FAN-TIEN

2 patents

US8983644B2Mar 17, 2015

Manufacturing execution system with virtual-metrology capabilities and manufacturing system including the same

CHENG FAN-TIEN8 citations81

US8688256B2Apr 1, 2014

Advanced process control system and method utilizing virtual metrology with reliance index

CHENG FAN-TIEN12 citations81

TAIWAN SEMICONDUCTOR MFG

1 patent

US7829815B2Nov 9, 2010

Adjustable electrodes and coils for plasma density distribution control

TAIWAN SEMICONDUCTOR MFG25 citations91

UNIV NAT CHENG KUNG

1 patent

US7603328B2Oct 13, 2009

Dual-phase virtual metrology method

UNIV NAT CHENG KUNG14 citations81

KAO CHI-AN

1 patent

US8207532B2Jun 26, 2012

Constant and reducible hole bottom CD in variable post-CMP thickness and after-development-inspection CD

KAO CHI-AN2 citations54