Inventor

KATALENIC ANDELKO

NL3 patents

Patents

3 patents

US9728931B2Aug 8, 2017

Electron injector and free electron laser

ASML NETHERLANDS BV5 citations81

US10580545B2Mar 3, 2020

Beam delivery apparatus and method

ASML NETHERLANDS BV6 citations70

US10103508B2Oct 16, 2018

Electron injector and free electron laser

ASML NETHERLANDS BV0 citations49