Inventor

YANG YUANSI

CN2 patents

Patents

2 patents

US12427619B2Sep 30, 2025

Wafer conveying device, chemical mechanical planarization apparatus and wafer conveying method

HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC0 citations42

US11794304B2Oct 24, 2023

Wafer polishing device

HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC0 citations34