Inventor
UEYAMA TUTOMU
JP3 patents
Patents
3 patentsUS5963753AOct 5, 1999
Substrate processing apparatus
DAINIPPON SCREEN MFG103 citations97
US6099643AAug 8, 2000
Apparatus for processing a substrate providing an efficient arrangement and atmospheric isolation of chemical treatment section
DAINIPPON SCREEN MFG61 citations95
US4751383AJun 14, 1988
Method and apparatus for detection of position with correction of errors caused by errors in scale pitch
DAINIPPON SCREEN MFG17 citations69