Inventor
SARFATY MOSHE
US27 patents
⚠️ This page may combine multiple inventors who share the name “SARFATY MOSHE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
16 patentsUS6745095B1Jun 1, 2004
Detection of process endpoint through monitoring fluctuation of output data
APPLIED MATERIALS INC515 citations97
US6521080B2Feb 18, 2003
Method and apparatus for monitoring a process by employing principal component analysis
APPLIED MATERIALS INC76 citations96
US6455437B1Sep 24, 2002
Method and apparatus for monitoring the process state of a semiconductor device fabrication process
APPLIED MATERIALS INC111 citations96
US6368975B1Apr 9, 2002
Method and apparatus for monitoring a process by employing principal component analysis
APPLIED MATERIALS INC90 citations96
US6633391B1Oct 14, 2003
Monitoring of film characteristics during plasma-based semi-conductor processing using optical emission spectroscopy
APPLIED MATERIALS INC57 citations95
US6413867B1Jul 2, 2002
Film thickness control using spectral interferometry
APPLIED MATERIALS INC101 citations93
US6888639B2May 3, 2005
In-situ film thickness measurement using spectral interference at grazing incidence
APPLIED MATERIALS INC21 citations92
US6627463B1Sep 30, 2003
Situ measurement of film nitridation using optical emission spectroscopy
APPLIED MATERIALS INC46 citations92
US6603538B1Aug 5, 2003
Method and apparatus employing optical emission spectroscopy to detect a fault in process conditions of a semiconductor processing system
APPLIED MATERIALS INC36 citations91
US6608495B2Aug 19, 2003
Eddy-optic sensor for object inspection
APPLIED MATERIALS INC15 citations90
US6589869B2Jul 8, 2003
Film thickness control using spectral interferometry
APPLIED MATERIALS INC26 citations88
US6843881B2Jan 18, 2005
Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber
APPLIED MATERIALS INC17 citations83
US7668702B2Feb 23, 2010
Method, system and medium for controlling manufacturing process using adaptive models based on empirical data
APPLIED MATERIALS INC7 citations73
US7042558B1May 9, 2006
Eddy-optic sensor for object inspection
APPLIED MATERIALS INC9 citations71
US7970588B2Jun 28, 2011
Method, system and medium for controlling manufacturing process using adaptive models based on empirical data
APPLIED MATERIALS INC2 citations62
US6936842B2Aug 30, 2005
Method and apparatus for process monitoring
APPLIED MATERIALS INC4 citations61
SARFATY MOSHE
4 patentsUS8437845B2May 7, 2013
Electrical methods for detection and characterization of abnormal tissue and cells
SARFATY MOSHE19 citations92
US8417328B2Apr 9, 2013
Electrical systems for detection and characterization of abnormal tissue and cells
SARFATY MOSHE22 citations92
US9566030B2Feb 14, 2017
Optical system for detection and characterization of abnormal tissue and cells
SARFATY MOSHE0 citations51
US9554743B2Jan 31, 2017
Methods for optical identification and characterization of abnormal tissue and cells
SARFATY MOSHE1 citations51