P

Inventor

HORII SADAYOSHI

JP28 patents
⚠️ This page may combine multiple inventors who share the name “HORII SADAYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

16 patents
US7648578B1Jan 19, 2010

Substrate processing apparatus, and method for manufacturing semiconductor device

HITACHI INT ELECTRIC INC30 citations92
US8026159B2Sep 27, 2011

Method of manufacturing semiconductor device and substrate processing apparatus

HITACHI INT ELECTRIC INC17 citations91
US6787481B2Sep 7, 2004

Method for manufacturing semiconductor device

HITACHI INT ELECTRIC INC29 citations91
US11476112B2Oct 18, 2022

Substrate processing apparatus

HITACHI INT ELECTRIC INC6 citations85
US9472637B2Oct 18, 2016

Semiconductor device having electrode made of high work function material and method of manufacturing the same

HITACHI INT ELECTRIC INC3 citations73
US6825126B2Nov 30, 2004

Manufacturing method of semiconductor device and substrate processing apparatus

HITACHI INT ELECTRIC INC11 citations71
US7531467B2May 12, 2009

Manufacturing method of semiconductor device and substrate processing apparatus

HITACHI INT ELECTRIC INC3 citations63
US7524766B2Apr 28, 2009

Method for manufacturing semiconductor device and substrate processing apparatus

HITACHI INT ELECTRIC INC3 citations63
US12087598B2Sep 10, 2024

Substrate processing apparatus

HITACHI INT ELECTRIC INC1 citations62
US7968437B2Jun 28, 2011

Semiconductor device manufacturing method and substrate processing apparatus

HITACHI INT ELECTRIC INC6 citations62
US7579276B2Aug 25, 2009

Substrate processing apparatus and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC3 citations62
US10604839B2Mar 31, 2020

Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate

HITACHI INT ELECTRIC INC1 citations61
US9653301B2May 16, 2017

Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same

HITACHI INT ELECTRIC INC0 citations52
US9437704B2Sep 6, 2016

Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same

HITACHI INT ELECTRIC INC1 citations52
US8741731B2Jun 3, 2014

Method of manufacturing a semiconductor device

HITACHI INT ELECTRIC INC1 citations52
US7723245B2May 25, 2010

Method for manufacturing semiconductor device, and substrate processing apparatus

HITACHI INT ELECTRIC INC1 citations52

HORII SADAYOSHI

5 patents

KOKUSAI ELECTRIC CORP

4 patents

TAKEBAYASHI YUJI

1 patent

OGAWA ARITO

1 patent

HARADA KAZUHIRO

1 patent