Inventor
ITATANI HIDEHARU
JP32 patents
⚠️ This page may combine multiple inventors who share the name “ITATANI HIDEHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
20 patentsUS6682971B2Jan 27, 2004
Method of manufacturing a semiconductor
HITACHI INT ELECTRIC INC467 citations98
US7648578B1Jan 19, 2010
Substrate processing apparatus, and method for manufacturing semiconductor device
HITACHI INT ELECTRIC INC30 citations92
US8367566B2Feb 5, 2013
Method for manufacturing semiconductor device and method for processing substrate
HITACHI INT ELECTRIC INC5 citations83
US9523150B2Dec 20, 2016
Substrate processing apparatus, method for manufacturing semiconductor device and computer-readable recording medium
HITACHI INT ELECTRIC INC3 citations73
US9472637B2Oct 18, 2016
Semiconductor device having electrode made of high work function material and method of manufacturing the same
HITACHI INT ELECTRIC INC3 citations73
US9786493B2Oct 10, 2017
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC2 citations71
US7531467B2May 12, 2009
Manufacturing method of semiconductor device and substrate processing apparatus
HITACHI INT ELECTRIC INC3 citations63
US7524766B2Apr 28, 2009
Method for manufacturing semiconductor device and substrate processing apparatus
HITACHI INT ELECTRIC INC3 citations63
US7968437B2Jun 28, 2011
Semiconductor device manufacturing method and substrate processing apparatus
HITACHI INT ELECTRIC INC6 citations62
US7579276B2Aug 25, 2009
Substrate processing apparatus and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC3 citations62
US6576481B2Jun 10, 2003
Method of manufacturing semiconductor devices
HITACHI INT ELECTRIC INC6 citations62
US10604839B2Mar 31, 2020
Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate
HITACHI INT ELECTRIC INC1 citations61
US10340237B2Jul 2, 2019
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC0 citations52
US9653301B2May 16, 2017
Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same
HITACHI INT ELECTRIC INC0 citations52
US9437704B2Sep 6, 2016
Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same
HITACHI INT ELECTRIC INC1 citations52
US8741731B2Jun 3, 2014
Method of manufacturing a semiconductor device
HITACHI INT ELECTRIC INC1 citations52
US7723245B2May 25, 2010
Method for manufacturing semiconductor device, and substrate processing apparatus
HITACHI INT ELECTRIC INC1 citations52
US7709276B2May 4, 2010
Manufacturing method of a semiconductor device and substrate processing apparatus
HITACHI INT ELECTRIC INC1 citations52
US6548404B2Apr 15, 2003
Method and apparatus for manufacturing semiconductor devices
HITACHI INT ELECTRIC INC0 citations51
US6204199B1Mar 20, 2001
Method for producing a semiconductor device
HITACHI INT ELECTRIC INC1 citations47
KOKUSAI ELECTRIC CORP
5 patentsUS11728183B2Aug 15, 2023
Method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP2 citations73
US11322370B1May 3, 2022
Method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP3 citations73
US12224185B2Feb 11, 2025
Method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations62
US10388530B2Aug 20, 2019
Method of manufacturing semiconductor device and substrate processing apparatus
KOKUSAI ELECTRIC CORP1 citations62
US10714316B2Jul 14, 2020
Method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations41