P

Inventor

KANOUFF MICHAEL P

US5 patents
⚠️ This page may combine multiple inventors who share the name “KANOUFF MICHAEL P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EUV LLC

3 patents
US6198792B1Mar 6, 2001

Wafer chamber having a gas curtain for extreme-UV lithography

EUV LLC34 citations90
US6714624B2Mar 30, 2004

Discharge source with gas curtain for protecting optics from particles

EUV LLC32 citations87
US6206528B1Mar 27, 2001

Surface figure control for coated optics

EUV LLC12 citations72

BARTSCH MICHAEL

1 patent
US8563325B1Oct 22, 2013

Coaxial microreactor for particle synthesis

BARTSCH MICHAEL88 citations94

KLA TENCOR CORP

1 patent
US10101664B2Oct 16, 2018

Apparatus and methods for optics protection from debris in plasma-based light source

KLA TENCOR CORP2 citations71