Inventor
SAHODA TSUTOMU
JP13 patents
⚠️ This page may combine multiple inventors who share the name “SAHODA TSUTOMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAHODA TSUTOMU
6 patentsUS8667924B2Mar 11, 2014
Coating device and nozzle managing method
SAHODA TSUTOMU5 citations71
US9214372B2Dec 15, 2015
Substrate processing system, carrying device and coating device
SAHODA TSUTOMU2 citations61
US8919756B2Dec 30, 2014
Substrate processing system, carrying device, and coating device
SAHODA TSUTOMU0 citations51
US8617655B2Dec 31, 2013
Coating device and coating method
SAHODA TSUTOMU1 citations51
US8567342B2Oct 29, 2013
Coating device and coating method
SAHODA TSUTOMU0 citations51
US8387556B2Mar 5, 2013
Substrate processing system
SAHODA TSUTOMU0 citations51
TOKYO OHKA KOGYO CO LTD
4 patentsUS5706930AJan 13, 1998
Method of and apparatus for transferring circular object
TOKYO OHKA KOGYO CO LTD19 citations92
US5879457AMar 9, 1999
Rotating cup coating device
TOKYO OHKA KOGYO CO LTD8 citations73
US5332557AJul 26, 1994
Heating apparatus
TOKYO OHKA KOGYO CO LTD15 citations73
US9236283B2Jan 12, 2016
Chamber apparatus and heating method
TOKYO OHKA KOGYO CO LTD4 citations67