Inventor
SHIMAI FUTOSHI
JP26 patents
⚠️ This page may combine multiple inventors who share the name “SHIMAI FUTOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
15 patentsUS5439519AAug 8, 1995
Solution applying apparatus
TOKYO OHKA KOGYO CO LTD58 citations94
US5688411ANov 18, 1997
Method of and apparatus for removing coating from edge of substrate
TOKYO OHKA KOGYO CO LTD63 citations93
US5972426AOct 26, 1999
Method of coating substrate with coating nozzle
TOKYO OHKA KOGYO CO LTD31 citations92
US5769946AJun 23, 1998
Coating nozzle and coating device having coating nozzle
TOKYO OHKA KOGYO CO LTD27 citations92
US6015467AJan 18, 2000
Method of removing coating from edge of substrate
TOKYO OHKA KOGYO CO LTD49 citations91
US6117623ASep 12, 2000
Remover solvent for partial removal of photoresist layer
TOKYO OHKA KOGYO CO LTD21 citations88
US6436472B1Aug 20, 2002
Method of applying a coating solution to a substrate surface using a rotary coater
TOKYO OHKA KOGYO CO LTD10 citations73
US5785759AJul 28, 1998
Rotating cup type liquid supply device
TOKYO OHKA KOGYO CO LTD7 citations73
US7975997B2Jul 12, 2011
Supporting pin
TOKYO OHKA KOGYO CO LTD4 citations62
US6423139B1Jul 23, 2002
Chemical liquid treatment apparatus
TOKYO OHKA KOGYO CO LTD5 citations61
US7943886B2May 17, 2011
Heat treatment apparatus
TOKYO OHKA KOGYO CO LTD0 citations52
US6761930B2Jul 13, 2004
Method of coating solution on substrate surface using a slit nozzle
TOKYO OHKA KOGYO CO LTD1 citations51
US11233245B2Jan 25, 2022
Catalyst-layer forming apparatus
TOKYO OHKA KOGYO CO LTD0 citations48
US7717295B2May 18, 2010
Treatment solution supply apparatus
TOKYO OHKA KOGYO CO LTD0 citations41
US7591900B2Sep 22, 2009
Nozzle for supplying treatment liquid and substrate treating apparatus
TOKYO OHKA KOGYO CO LTD0 citations41
SAHODA TSUTOMU
6 patentsUS8667924B2Mar 11, 2014
Coating device and nozzle managing method
SAHODA TSUTOMU5 citations71
US9214372B2Dec 15, 2015
Substrate processing system, carrying device and coating device
SAHODA TSUTOMU2 citations61
US8919756B2Dec 30, 2014
Substrate processing system, carrying device, and coating device
SAHODA TSUTOMU0 citations51
US8617655B2Dec 31, 2013
Coating device and coating method
SAHODA TSUTOMU1 citations51
US8567342B2Oct 29, 2013
Coating device and coating method
SAHODA TSUTOMU0 citations51
US8387556B2Mar 5, 2013
Substrate processing system
SAHODA TSUTOMU0 citations51