Inventor
NAKATSUKA YASUHIKO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “NAKATSUKA YASUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
5 patentsUS6066508AMay 23, 2000
Process for manufacturing semiconductor integrated circuit device including treatment of gas used in the process
HITACHI LTD43 citations95
US6521550B2Feb 18, 2003
Process for manufacturing semiconductor integrated circuit device including treatment of gas used in the process
HITACHI LTD14 citations91
US6403475B1Jun 11, 2002
Fabrication method for semiconductor integrated device
HITACHI LTD13 citations73
US6602808B2Aug 5, 2003
Process for manufacturing semiconductor integrated circuit device including treatment of gas used in the process
HITACHI LTD6 citations72
US6319860B1Nov 20, 2001
Process for manufacturing semiconductor integrated circuit device including treatment of gas used in the process
HITACHI LTD9 citations72