Inventor

CHEN SAU NGEN

SG2 patents

Patents

2 patents

US7790477B2Sep 7, 2010

Apparatus and method for cleaning glass substrates using a cool hydrogen flame

AGENCY SCIENCE TECH & RES6 citations66

US7504267B2Mar 17, 2009

Apparatus and method for cleaning glass substrates using a cool hydrogen flame

AGENCY SCIENCE TECH & RES4 citations55