P

Inventor

DUNSTAN WAYNE J

US9 patents
⚠️ This page may combine multiple inventors who share the name “DUNSTAN WAYNE J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CYMER INC

4 patents
US7741639B2Jun 22, 2010

Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection control

CYMER INC12 citations82
US7835414B2Nov 16, 2010

Laser gas injection system

CYMER INC13 citations81
US7830942B2Nov 9, 2010

Ultraviolet laser light source pulse energy control system

CYMER INC3 citations62
US7852889B2Dec 14, 2010

Active spectral control of DUV light source

CYMER INC3 citations60

ASML NETHERLANDS BV

2 patents
US9755396B1Sep 5, 2017

EUV LPP source with improved dose control by combining pulse modulation and pulse control mode

ASML NETHERLANDS BV4 citations70
US9588430B2Mar 7, 2017

System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production

ASML NETHERLANDS BV1 citations45

FRIHAUF PAUL

1 patent
US8598552B1Dec 3, 2013

System and method to optimize extreme ultraviolet light generation

FRIHAUF PAUL25 citations87

DUNSTAN WAYNE J

1 patent
US8098698B2Jan 17, 2012

Active spectral control of DUV laser light source

DUNSTAN WAYNE J5 citations57

VAN DER BURGT JEROEN

1 patent
US9238243B2Jan 19, 2016

System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production

VAN DER BURGT JEROEN1 citations39