Inventor

LOPAEV DMITRIY VICTOROVICH

RU2 patents

⚠️ This page may combine multiple inventors who share the name “LOPAEV DMITRIY VICTOROVICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US7872244B2Jan 18, 2011

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations49

RAKHIMOVA TATYANA VICTOROVNA

1 patent

US8317929B2Nov 27, 2012

Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatus

RAKHIMOVA TATYANA VICTOROVNA1 citations35