Inventor

SADA KOICHI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “SADA KOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MORITA SHINYA

1 patent

US8076615B2Dec 13, 2011

Substrate processing apparatus and method of manufacturing semiconductor device

MORITA SHINYA13 citations81

NAKADA TAKAYUKI

1 patent

US8398771B2Mar 19, 2013

Substrate processing apparatus

NAKADA TAKAYUKI6 citations69