Inventor
WAKE SEIJI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “WAKE SEIJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
4 patentsUS7652271B2Jan 26, 2010
Charged-particle beam lithography with grid matching for correction of beam shot position deviation
NUFLARE TECHNOLOGY INC9 citations82
US10325755B2Jun 18, 2019
Charged particle beam lithography apparatus and charged particle beam lithography method
NUFLARE TECHNOLOGY INC1 citations59
US7598504B2Oct 6, 2009
Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatus
NUFLARE TECHNOLOGY INC4 citations57
US7900185B2Mar 1, 2011
Pattern writing circuit self-diagnosis method for charged beam photolithography apparatus and charged beam photolithography apparatus
NUFLARE TECHNOLOGY INC1 citations47
NAKAYAMADA NORIAKI
3 patentsUS8178856B2May 15, 2012
Charged particle beam writing apparatus and method thereof
NAKAYAMADA NORIAKI22 citations90
US8129698B2Mar 6, 2012
Charged-particle beam writing method and charged-particle beam writing apparatus
NAKAYAMADA NORIAKI9 citations81
US8502175B2Aug 6, 2013
Charged particle beam pattern forming apparatus and charged particle beam pattern forming method
NAKAYAMADA NORIAKI5 citations71