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Inventor
WHALEY SHAWN
US
2 patents
⚠️ This page may combine multiple inventors who share the name “WHALEY SHAWN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
1 patent
US10087525B2
Oct 2, 2018
Variable gap hard stop design
ASM IP HOLDING BV
466 citations
93
HERBOTS NICOLE
1 patent
US9589801B2
Mar 7, 2017
Methods for wafer bonding and for nucleating bonding nanophases using wet and steam pressurization
HERBOTS NICOLE
1 citations
36