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Inventor
KO Shangbin
US
3 patents
Patents
3 patents
US9748358B2
Aug 29, 2017
Gap fill of metal stack in replacement gate process
IBM
3 citations
70
US10229984B2
Mar 12, 2019
Gap fill of metal stack in replacement gate process
IBM
0 citations
49
US9935174B2
Apr 3, 2018
Gap fill of metal stack in replacement gate process
IBM
0 citations
49