Inventor

FUKUNAGA TSUTOMU

JP3 patents

⚠️ This page may combine multiple inventors who share the name “FUKUNAGA TSUTOMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US8378272B2Feb 19, 2013

Heat treatment apparatus, heat treatment method and storage medium

TOKYO ELECTRON LTD7 citations80

US12491602B2Dec 9, 2025

Substrate processing apparatus, polishing pad inspecting device, and method for inspecting polishing pad

TOKYO ELECTRON LTD0 citations43

NHK SPRING CO LTD

1 patent

US8733537B2May 27, 2014

Guiding apparatus that maintains attitude of suspended object during conveyance

NHK SPRING CO LTD1 citations43