Inventor

MA XIAOBING DIANA

US2 patents

Patents

2 patents

US5866483AFeb 2, 1999

Method for anisotropically etching tungsten using SF6, CHF3, and N2

APPLIED MATERIALS INC254 citations93

US5387556AFeb 7, 1995

Etching aluminum and its alloys using HC1, C1-containing etchant and N.sub.2

APPLIED MATERIALS INC49 citations89