Inventor
SHULMAN BENJAMIN
IL3 patents
Patents
3 patentsUS6045433AApr 4, 2000
Apparatus for optical inspection of wafers during polishing
NOVA MEASURING INSTR LTD91 citations95
US6964276B2Nov 15, 2005
Wafer monitoring system
NOVA MEASURING INSTR LTD12 citations78
US6368182B2Apr 9, 2002
Apparatus for optical inspection of wafers during polishing
NOVA MEASURING INSTR LTD5 citations57