Inventor

BOGART BOB

US5 patents

⚠️ This page may combine multiple inventors who share the name “BOGART BOB”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATTSON TECH INC

4 patents

US6717158B1Apr 6, 2004

Heating device for heating semiconductor wafers in thermal processing chambers

MATTSON TECH INC74 citations95

US6771895B2Aug 3, 2004

Heating device for heating semiconductor wafers in thermal processing chambers

MATTSON TECH INC35 citations94

US7608802B2Oct 27, 2009

Heating device for heating semiconductor wafers in thermal processing chambers

MATTSON TECH INC12 citations91

US7038174B2May 2, 2006

Heating device for heating semiconductor wafers in thermal processing chambers

MATTSON TECH INC19 citations91

GAT ARNON

1 patent

US8138451B2Mar 20, 2012

Heating device for heating semiconductor wafers in thermal processing chambers

GAT ARNON15 citations90