Inventor
BRAECKELMANN GREG
DE3 patents
Patents
3 patentsUS8264060B2Sep 11, 2012
Method of sealing an air gap in a layer of a semiconductor structure and semiconductor structure
BRAECKELMANN GREG10 citations80
US8071459B2Dec 6, 2011
Method of sealing an air gap in a layer of a semiconductor structure and semiconductor structure
BRAECKELMANN GREG8 citations80
US8202798B2Jun 19, 2012
Improvements for reducing electromigration effect in an integrated circuit
BRAECKELMANN GREG0 citations48