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Inventor
RAVU SAIRAM
IN
4 patents
⚠️ This page may combine multiple inventors who share the name “RAVU SAIRAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
2 patents
US10267748B2
Apr 23, 2019
Optimizing training sets used for setting up inspection-related algorithms
KLA TENCOR CORP
12 citations
80
US11237119B2
Feb 1, 2022
Diagnostic methods for the classifiers and the defects captured by optical tools
KLA TENCOR CORP
0 citations
49
KLA CORP
2 patents
US11379967B2
Jul 5, 2022
Methods and systems for inspection of semiconductor structures with automatically generated defect features
KLA CORP
2 citations
70
US11676264B2
Jun 13, 2023
System and method for determining defects using physics-based image perturbations
KLA CORP
3 citations
67