Inventor
TAKAKI DAICHI
JP23 patents
⚠️ This page may combine multiple inventors who share the name “TAKAKI DAICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
11 patentsUS9017924B2Apr 28, 2015
Resist composition, method of forming resist pattern, polymeric compound and compound
TOKYO OHKA KOGYO CO LTD24 citations92
US8685620B2Apr 1, 2014
Resist composition, method of forming resist pattern and polymeric compound
TOKYO OHKA KOGYO CO LTD8 citations83
US8778595B2Jul 15, 2014
Resist composition, method of forming resist pattern, and polymeric compound
TOKYO OHKA KOGYO CO LTD2 citations62
US10429740B2Oct 1, 2019
Method of recovering resist pattern
TOKYO OHKA KOGYO CO LTD1 citations58
US9091915B2Jul 28, 2015
Resist composition, method of forming resist pattern, polymeric compound and method of producing polymeric compound
TOKYO OHKA KOGYO CO LTD0 citations52
US9678423B2Jun 13, 2017
Resist composition, method for forming resist pattern, acid generator and compound
TOKYO OHKA KOGYO CO LTD0 citations51
US9133102B2Sep 15, 2015
Resist composition, method of forming resist pattern and polymeric compound
TOKYO OHKA KOGYO CO LTD0 citations51
US11703757B2Jul 18, 2023
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations48
US10514600B2Dec 24, 2019
Resist composition, method of forming resist pattern, compound, and acid diffusion control agent
TOKYO OHKA KOGYO CO LTD0 citations45
US9639002B2May 2, 2017
Method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations41
US9671690B2Jun 6, 2017
Resist composition, method for forming resist pattern, photo-reactive quencher and compound
TOKYO OHKA KOGYO CO LTD0 citations38
HIRANO TOMOYUKI
4 patentsUS8911928B2Dec 16, 2014
Resist composition, method of forming resist pattern, polymeric compound and method of producing the same
HIRANO TOMOYUKI0 citations51
US9250531B2Feb 2, 2016
Method of forming resist pattern and negative tone-development resist composition
HIRANO TOMOYUKI0 citations50
US8735045B2May 27, 2014
Positive resist composition, method of forming resist pattern, and polymeric compound
HIRANO TOMOYUKI0 citations41
US8450044B2May 28, 2013
Positive resist composition and method of forming resist pattern
HIRANO TOMOYUKI0 citations41