Inventor
LAWLOR BRIAN F
US5 patents
Patents
5 patentsUS6682997B1Jan 27, 2004
Angled implant in a fabrication technique to improve conductivity of a base material
MICRON TECHNOLOGY INC9 citations68
US6806197B2Oct 19, 2004
Method of forming integrated circuitry, and method of forming a contact opening
MICRON TECHNOLOGY INC4 citations60
US7291895B2Nov 6, 2007
Integrated circuitry
MICRON TECHNOLOGY INC0 citations49
US7442608B2Oct 28, 2008
Methods of fabricating a semiconductor device using angled implantation
MICRON TECHNOLOGY INC0 citations47
US7148534B2Dec 12, 2006
Angled implant in a fabrication technique to improve conductivity of a base material
MICRON TECHNOLOGY INC0 citations47