Inventor

MÄNTYMÄKI MIIA

FI2 patents

Patents

2 patents

US9382615B2Jul 5, 2016

Vapor deposition of LiF thin films

ASM IP HOLDING BV6 citations79

US9394609B2Jul 19, 2016

Atomic layer deposition of aluminum fluoride thin films

ASM IP HOLDING BV1 citations49