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Inventor
OKAMOTO YASUHARU
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “OKAMOTO YASUHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEN CORP
2 patents
US9646837B2
May 9, 2017
Ion implantation method and ion implantation apparatus
SEN CORP
3 citations
70
US9305784B2
Apr 5, 2016
Ion implantation method and ion implantation apparatus
SEN CORP
5 citations
70
NINOMIYA SHIRO
1 patent
US8772741B2
Jul 8, 2014
Ion implantation method and ion implantation apparatus
NINOMIYA SHIRO
7 citations
80
SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD
1 patent
US9984856B2
May 29, 2018
Ion implantation apparatus
SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD
2 citations
69