Inventor

KATO RICHIKA

US2 patents

Patents

2 patents

US10043661B2Aug 7, 2018

Method for protecting layer by forming hydrocarbon-based extremely thin film

ASM IP HOLDING BV463 citations96

US9899291B2Feb 20, 2018

Method for protecting layer by forming hydrocarbon-based extremely thin film

ASM IP HOLDING BV463 citations95