Inventor

FUJISAKI EITA

JP2 patents

Patents

2 patents

US11024485B2Jun 1, 2021

Multi-charged-particle-beam writing apparatus and beam evaluating method for the same

NUFLARE TECHNOLOGY INC1 citations54

US10541105B2Jan 21, 2020

Multi charged particle beam writing apparatus and adjusting method for multi charged particle beam writing apparatus

NUFLARE TECHNOLOGY INC0 citations33