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Inventor
TOYOTA MASATO
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “TOYOTA MASATO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
RENESAS TECH CORP
1 patent
US6768542B2
Jul 27, 2004
Defect inspecting device for substrate to be processed and method of manufacturing semiconductor device
RENESAS TECH CORP
18 citations
81
SHIKOKU INSTRUMENTATION CO LTD
1 patent
US5679204A
Oct 21, 1997
Plasma apparatus
SHIKOKU INSTRUMENTATION CO LTD
4 citations
55