Inventor

THURN-ALBRECHT THOMAS

DE4 patents

Patents

4 patents

US7190049B2Mar 13, 2007

Nanocylinder arrays

UNIV MASSACHUSETTS142 citations96

US6391217B2May 21, 2002

Methods and apparatus for forming submicron patterns on films

UNIV MASSACHUSETTS206 citations94

US7572669B2Aug 11, 2009

Nanocylinder arrays

UNIV MASSACHUSETTS41 citations89

US7014786B2Mar 21, 2006

Methods and apparatus for forming submicron patterns on films

UNIV MASSACHUSETTS1 citations45