P
PatentIndex
Search
Landscape
Sign in
Inventor
NISIHATA HIROSI
JP
2 patents
Patents
2 patents
US9704730B2
Jul 11, 2017
Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium
TOKYO ELECTRON LTD
2 citations
69
US9805958B2
Oct 31, 2017
Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium
TOKYO ELECTRON LTD
0 citations
48