Inventor
AMAGAI SHIRO
JP3 patents
Patents
3 patentsUS11325220B2May 10, 2022
Double-side polishing method and double-side polishing apparatus
SHINETSU HANDOTAI KK0 citations56
US10395933B2Aug 27, 2019
Method for manufacturing semiconductor wafer
SHINETSU HANDOTAI KK0 citations33
US10147656B2Dec 4, 2018
Sizing device, polishing apparatus, and polishing method
SHINETSU HANDOTAI KK0 citations31