Inventor
ANADA KAZUKI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “ANADA KAZUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOTO LTD
10 patentsUS9627240B2Apr 18, 2017
Electrostatic chuck
TOTO LTD17 citations92
US9960067B2May 1, 2018
Electrostatic chuck
TOTO LTD17 citations83
US9905449B2Feb 27, 2018
Electrostatic chuck
TOTO LTD2 citations72
US10714373B2Jul 14, 2020
Electrostatic chuck and wafer processing apparatus
TOTO LTD2 citations71
US9093488B2Jul 28, 2015
AC-driven electrostatic chuck
TOTO LTD6 citations67
US10373853B2Aug 6, 2019
Electrostatic chuck and wafer processing apparatus
TOTO LTD1 citations60
US9042078B2May 26, 2015
Electrostatic chuck
TOTO LTD2 citations60
US9300229B2Mar 29, 2016
Electrostatic chuck
TOTO LTD0 citations39
US9252041B2Feb 2, 2016
Electrostatic chuck
TOTO LTD0 citations39
US9252040B2Feb 2, 2016
Electrostatic chuck
TOTO LTD0 citations39