Inventor
WADA TAKUMA
JP11 patents
⚠️ This page may combine multiple inventors who share the name “WADA TAKUMA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOTO LTD
10 patentsUS10714373B2Jul 14, 2020
Electrostatic chuck and wafer processing apparatus
TOTO LTD2 citations71
US9042078B2May 26, 2015
Electrostatic chuck
TOTO LTD2 citations60
US11117356B2Sep 14, 2021
Composite structure
TOTO LTD0 citations59
US10759710B2Sep 1, 2020
Composite structure, semiconductor manufacturing apparatus and display manufacturing apparatus provided with composite structure
TOTO LTD1 citations58
US11142829B2Oct 12, 2021
Semiconductor manufacturing apparatus member, and display manufacturing apparatus and semiconductor manufacturing apparatus comprising semiconductor manufacturing apparatus member
TOTO LTD1 citations57
US11939678B2Mar 26, 2024
Method of making a semiconductor manufacturing apparatus member
TOTO LTD0 citations47
US12051568B2Jul 30, 2024
Semiconductor manufacturing apparatus
TOTO LTD0 citations45
US9300229B2Mar 29, 2016
Electrostatic chuck
TOTO LTD0 citations39
US9252040B2Feb 2, 2016
Electrostatic chuck
TOTO LTD0 citations39
US9252041B2Feb 2, 2016
Electrostatic chuck
TOTO LTD0 citations39