Inventor
CADOT STÉPHANE
FR2 patents
Patents
2 patentsUS12329032B2Jun 10, 2025
Method for manufacturing a layer of textured aluminum nitride
COMMISSARIAT ENERGIE ATOMIQUE0 citations39
US11286557B2Mar 29, 2022
Method of forming a crystalline thin film having the formula MY2 using an ALD-formed amorphous thin film having the formula MYx as a precursor
COMMISSARIAT ENERGIE ATOMIQUE0 citations37