Inventor
BROUK VICTOR
US30 patents
⚠️ This page may combine multiple inventors who share the name “BROUK VICTOR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED ENERGY IND INC
20 patentsUS10269540B1Apr 23, 2019
Impedance matching system and method of operating the same
ADVANCED ENERGY IND INC154 citations99
US11011349B2May 18, 2021
System, method, and apparatus for controlling ion energy distribution in plasma processing systems
ADVANCED ENERGY IND INC49 citations98
US8742669B2Jun 3, 2014
Passive power distribution for multiple electrode inductive plasma source
ADVANCED ENERGY IND INC102 citations98
US9208992B2Dec 8, 2015
Method for controlling ion energy distribution
ADVANCED ENERGY IND INC107 citations97
US9105447B2Aug 11, 2015
Wide dynamic range ion energy bias control; fast ion energy switching; ion energy control and a pulsed bias supply; and a virtual front panel
ADVANCED ENERGY IND INC100 citations96
US11437221B2Sep 6, 2022
Spatial monitoring and control of plasma processing environments
ADVANCED ENERGY IND INC16 citations94
US11189454B2Nov 30, 2021
Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system
ADVANCED ENERGY IND INC20 citations94
US9589767B2Mar 7, 2017
Systems, methods, and apparatus for minimizing cross coupled wafer surface potentials
ADVANCED ENERGY IND INC26 citations94
US9524854B2Dec 20, 2016
Electrostatic remote plasma source system and method
ADVANCED ENERGY IND INC28 citations93
US9142388B2Sep 22, 2015
Capacitively coupled remote plasma source
ADVANCED ENERGY IND INC25 citations92
US11615941B2Mar 28, 2023
System, method, and apparatus for controlling ion energy distribution in plasma processing systems
ADVANCED ENERGY IND INC14 citations86
US11978611B2May 7, 2024
Apparatus with switches to produce a waveform
ADVANCED ENERGY IND INC6 citations85
US7822565B2Oct 26, 2010
System, method, and apparatus for monitoring characteristics of RF power
ADVANCED ENERGY IND INC8 citations82
US12159767B2Dec 3, 2024
Spatial control of plasma processing environments
ADVANCED ENERGY IND INC2 citations73
US12154759B2Nov 26, 2024
Apparatus to control a waveform
ADVANCED ENERGY IND INC2 citations73
US12142452B2Nov 12, 2024
Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system
ADVANCED ENERGY IND INC1 citations73
US12354836B2Jul 8, 2025
System, method, and apparatus for controlling ion energy distribution in plasma processing systems
ADVANCED ENERGY IND INC0 citations63
US12567572B2Mar 3, 2026
Plasma behaviors predicted by current measurements during asymmetric bias waveform application
ADVANCED ENERGY IND INC0 citations62
US12505980B2Dec 23, 2025
Apparatus to produce a waveform
ADVANCED ENERGY IND INC0 citations62
US12255048B2Mar 18, 2025
Apparatus to control ion energy
ADVANCED ENERGY IND INC0 citations62
BROUK VICTOR
5 patentsUS9767988B2Sep 19, 2017
Method of controlling the switched mode ion energy distribution system
BROUK VICTOR124 citations99
US9362089B2Jun 7, 2016
Method of controlling the switched mode ion energy distribution system
BROUK VICTOR72 citations98
US9287086B2Mar 15, 2016
System, method and apparatus for controlling ion energy distribution
BROUK VICTOR152 citations98
US9435029B2Sep 6, 2016
Wafer chucking system for advanced plasma ion energy processing systems
BROUK VICTOR106 citations97
US9287092B2Mar 15, 2016
Method and apparatus for controlling ion energy distribution
BROUK VICTOR113 citations97
HOFFMAN DANIEL J
3 patentsUS9309594B2Apr 12, 2016
System, method and apparatus for controlling ion energy distribution of a projected plasma
HOFFMAN DANIEL J79 citations98
US8723423B2May 13, 2014
Electrostatic remote plasma source
HOFFMAN DANIEL J56 citations97
US9210790B2Dec 8, 2015
Systems and methods for calibrating a switched mode ion energy distribution system
HOFFMAN DANIEL J104 citations95