Inventor
SCHRIJVER RAYMOND LAURENTIUS J
NL3 patents
Patents
3 patentsUS7239370B2Jul 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations71
US6707530B2Mar 16, 2004
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV11 citations71
US6933513B2Aug 23, 2005
Gas flushing system for use in lithographic apparatus
ASML NETHERLANDS BV9 citations69