Inventor

TANEDA YASUYUKI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “TANEDA YASUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NUFLARE TECHNOLOGY INC

2 patents

US9472372B2Oct 18, 2016

Charged particle beam writing apparatus and charged particle beam writing method

NUFLARE TECHNOLOGY INC1 citations49

US9401261B2Jul 26, 2016

Ozone supplying apparatus, ozone supplying method, and charged particle beam drawing system

NUFLARE TECHNOLOGY INC1 citations48

SHIOKAWA YOSHIRO

2 patents

US8324568B2Dec 4, 2012

Mass spectrometer and mass spectrometry method

SHIOKAWA YOSHIRO0 citations48

US8309917B2Nov 13, 2012

Mass spectrometry and mass spectrometer used for the same

SHIOKAWA YOSHIRO1 citations48

CANON ANELVA CORP

1 patent

US8378576B2Feb 19, 2013

Ion beam generator

CANON ANELVA CORP12 citations81