Inventor
URBANSKI LUKASZ
US2 patents
Patents
2 patentsUS9007562B2Apr 14, 2015
Extreme ultraviolet/soft X-ray laser nano-scale patterning using the demagnified talbot effect
UNIV COLORADO STATE RES FOUND11 citations78
US9216590B2Dec 22, 2015
Extreme ultraviolet/soft X-ray laser nano-scale patterning using the demagnified Talbot effect
UNIV COLORADO STATE RES FOUND0 citations46