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Inventor
LEE HWA-CHUL
KR
2 patents
Patents
2 patents
US9515022B2
Dec 6, 2016
Semiconductor device with air gap and method for fabricating the same
SK HYNIX INC
24 citations
91
US9379004B1
Jun 28, 2016
Semiconductor device with air gap and method for fabricating the same
SK HYNIX INC
36 citations
91