Inventor

BORDIGA PETER C

US3 patents

⚠️ This page may combine multiple inventors who share the name “BORDIGA PETER C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATTSON TECH INC

2 patents

US7115837B2Oct 3, 2006

Selective reflectivity process chamber with customized wavelength response and method

MATTSON TECH INC38 citations91

US7737385B2Jun 15, 2010

Selective reflectivity process chamber with customized wavelength response and method

MATTSON TECH INC13 citations82

TIMANS PAUL J

1 patent

US9633876B2Apr 25, 2017

Selective reflectivity process chamber with customized wavelength response and method

TIMANS PAUL J5 citations81